Room-temperature laser annealing for solid-phase epitaxial...

Applied Physics Express 2016 / 10 Vol. 9; Iss. 10

Room-temperature laser annealing for solid-phase epitaxial crystallization of β-Ga 2 O 3 thin films

Shiojiri, Daishi, Fukuda, Daiji, Yamauchi, Ryosuke, Tsuchimine, Nobuo, Koyama, Koji, Kaneko, Satoru, Matsuda, Akifumi, Yoshimoto, Mamoru
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Volume:
9
Language:
english
Journal:
Applied Physics Express
DOI:
10.7567/APEX.9.105502
Date:
October, 2016
File:
PDF, 944 KB
english, 2016
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