The Influence of Hydrogen on Defects of In–Ga–Zn–O...

IEEE Electron Device Letters 2016 / 9 Vol. 37; Iss. 9

The Influence of Hydrogen on Defects of In–Ga–Zn–O Semiconductor Thin-Film Transistors With Atomic-Layer Deposition of Al 2 O 3

Kim, Taeho, Nam, Yunyong, Hur, Jihyun, Park, Sang-Hee Ko, Jeon, Sanghun
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Volume:
37
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2016.2594258
Date:
September, 2016
File:
PDF, 528 KB
english, 2016
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