Dielectric charging phenomena in diamond films used in RF...

Microelectronics Reliability 2016 / 09 Vol. 64

Dielectric charging phenomena in diamond films used in RF MEMS capacitive switches: The effect of film thickness

Koutsoureli, M., Zevgolatis, A., Saada, S., Mer-Calfati, C., Michalas, L., Papaioannou, G., Bergonzo, P.
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Volume:
64
Language:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2016.07.053
Date:
September, 2016
File:
PDF, 713 KB
english, 2016
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