Deep Levels in W-Doped Czochralski Silicon
Simoen, E., Saga, K., Vrielinck, H., Lauwaert, J.Volume:
5
Year:
2016
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0011604jss
File:
PDF, 1.34 MB
english, 2016