![](/img/cover-not-exists.png)
Observation of temperature effect on electrical properties of novel Au/Bi0.7Dy0.3FeO3/ZnO/p-Si thin film MIS capacitor for MEMS applications
Bhatia, Deepak, Roy, Sandipta, Nawaz, S., Meena, R.S., Palkar, V.R.Volume:
168
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2016.11.001
Date:
January, 2017
File:
PDF, 2.02 MB
english, 2017