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Volume 168
Main
Microelectronic Engineering
Volume 168
Microelectronic Engineering
Volume 168
1
MEMS-based fabrication of high-performance inductors with back hollow structure and ferromagnetic film
Wang, Gang
,
Liu, Houfang
,
Qiu, Haochuan
,
Ning, Keyu
,
Yang, Yi
,
Li, Xiaoli
,
Xu, Xiaohong
,
Lavanant-Jambert, Marion
,
Petit-Watelot, Sébastien
,
Lu, Yuan
,
Ren, Tian-Ling
Journal:
Microelectronic Engineering
Year:
2017
Language:
english
File:
PDF, 1.04 MB
Your tags:
english, 2017
2
Fractal inductors on flexible plastic substrate fabricated by laser ablation
Djuric, Snezana M.
,
Dubourg, Georges
Journal:
Microelectronic Engineering
Year:
2017
Language:
english
File:
PDF, 2.11 MB
Your tags:
english, 2017
3
A fast and manufacture-friendly optical proximity correction based on machine learning
Ma, Xu
,
Jiang, Shangliang
,
Wang, Jie
,
Wu, Bingliang
,
Song, Zhiyang
,
Li, Yanqiu
Journal:
Microelectronic Engineering
Year:
2017
Language:
english
File:
PDF, 2.46 MB
Your tags:
english, 2017
4
Spin-coated silver nanocomposite resistive switching devices
Rajan, Krishna
,
Bocchini, Sergio
,
Chiappone, Annalisa
,
Roppolo, Ignazio
,
Perrone, Denis
,
Bejtka, Katarzyna
,
Ricciardi, Carlo
,
Pirri, Candido Fabrizio
,
Chiolerio, Alessandro
Journal:
Microelectronic Engineering
Year:
2017
Language:
english
File:
PDF, 1.08 MB
Your tags:
english, 2017
5
Observation of temperature effect on electrical properties of novel Au/Bi0.7Dy0.3FeO3/ZnO/p-Si thin film MIS capacitor for MEMS applications
Bhatia, Deepak
,
Roy, Sandipta
,
Nawaz, S.
,
Meena, R.S.
,
Palkar, V.R.
Journal:
Microelectronic Engineering
Year:
2017
Language:
english
File:
PDF, 2.02 MB
Your tags:
english, 2017
6
Removal rate and surface quality of the GLSI silicon substrate during the CMP process
Hong, Jiao
,
Niu, Xinhuan
,
Liu, Yuling
,
Wang, Chenwei
,
Zhang, Baoguo
,
Sun, Ming
,
Wang, Juan
,
Han, Liying
,
Zhang, Wenqian
Journal:
Microelectronic Engineering
Year:
2017
Language:
english
File:
PDF, 1.57 MB
Your tags:
english, 2017
7
Comparative study of SML electron beam resist characteristics with different developers
Aassime, A.
,
Bayle, F.
,
Plante, M.P.
,
Hamouda, F.
Journal:
Microelectronic Engineering
Year:
2017
Language:
english
File:
PDF, 1.25 MB
Your tags:
english, 2017
8
High performance Ge ultra-shallow junctions fabricated by a novel formation technique featuring spin-on dopant and laser annealing for sub-10nm technology applications
Li, Junkang
,
Cheng, Ran
,
Liu, Chang
,
Zhang, Pengzhan
,
Lu, Jiwu
,
Chen, Kunji
,
Zhang, Rui
,
Zhao, Yi
Journal:
Microelectronic Engineering
Year:
2017
Language:
english
File:
PDF, 405 KB
Your tags:
english, 2017
9
On the spatial resolution limit of direct-write electron beam lithography
Jiang, Nan
Journal:
Microelectronic Engineering
Year:
2017
Language:
english
File:
PDF, 384 KB
Your tags:
english, 2017
10
Effect of SiO2 hexagonal pattern on the crystal and optical properties of epitaxial lateral overgrown semipolar (11-22) GaN film
Lee, Jae-Hwan
,
Han, Sang-Hyun
,
Song, Ki-Ryong
,
Ryou, Jae-Hyun
,
Na, Hyunseok
,
Lee, Sung-Nam
Journal:
Microelectronic Engineering
Year:
2017
Language:
english
File:
PDF, 1016 KB
Your tags:
english, 2017
11
Fabrication and characterization of dual AFM probe with narrow-gapped silicon tips and switchable cantilevers with magneto-strictive FePd film actuator
Mineta, Takashi
,
Kawashima, Kenta
,
Taguchi, Ryoga
Journal:
Microelectronic Engineering
Year:
2017
Language:
english
File:
PDF, 1.87 MB
Your tags:
english, 2017
12
Experimental study of LiNbO3 memristors for use in neuromorphic computing
Wang, Shu
,
Wang, Weisong
,
Yakopcic, Chris
,
Shin, Eunsung
,
Subramanyam, Guru
,
Taha, Tarek M.
Journal:
Microelectronic Engineering
Year:
2017
Language:
english
File:
PDF, 633 KB
Your tags:
english, 2017
13
Thermal convective inclinometer using carbon nanotube yarn
Han, Maeum
,
Bang, Younghwan
,
Kim, Woojin
,
Lee, Gil S.
,
Jung, Daewoong
Journal:
Microelectronic Engineering
Year:
2017
Language:
english
File:
PDF, 913 KB
Your tags:
english, 2017
14
RF performance of ink-jet printed microstrip lines on rigid and flexible substrates
Sim, Sung-min
,
Lee, Yeonsu
,
Kang, Hye-Lim
,
Shin, Kwon-Yong
,
Lee, Sang-Ho
,
Kim, Jung-Mu
Journal:
Microelectronic Engineering
Year:
2017
Language:
english
File:
PDF, 1.65 MB
Your tags:
english, 2017
15
Editorial Board
Journal:
Microelectronic Engineering
Year:
2017
File:
PDF, 32 KB
Your tags:
2017
1
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