Stability enhancement of low temperature thin-film transistors with atomic-layer-deposited ZnO:Al channels
Liu, Wen-Jun, Wang, You-Hang, Zheng, Li-Li, Lu, Hong-Liang, Ding, Shi-JinVolume:
167
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2016.11.010
Date:
January, 2017
File:
PDF, 2.15 MB
english, 2017