Monolithic integration of Si-MOSFET and GaN-LED using...

Applied Physics Express 2016 / 10 Vol. 9; Iss. 10

Monolithic integration of Si-MOSFET and GaN-LED using Si/SiO 2 /GaN-LED wafer

Tsuchiyama, Kazuaki, Yamane, Keisuke, Utsunomiya, Shu, Sekiguchi, Hiroto, Okada, Hiroshi, Wakahara, Akihiro
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Volume:
9
Language:
english
Journal:
Applied Physics Express
DOI:
10.7567/APEX.9.104101
Date:
October, 2016
File:
PDF, 718 KB
english, 2016
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