Rapid Recovery Process of Plasma Damaged Porous Low-k...

Solid State Phenomena 2016 / 9 Vol. 255

Rapid Recovery Process of Plasma Damaged Porous Low-k Dielectrics by Wet Surface Modifying Treatment

Iwasaki, Akihisa, Higuchi, Ayumi, Komori, Kana, Sato, Masanobu, Kesters, Els, Le, Quoc Toan, Holsteyns, Frank
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Volume:
255
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.255.223
Date:
September, 2016
File:
PDF, 378 KB
english, 2016
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