Impact of Dissolved Oxygen in Dilute HF Solution on...

Solid State Phenomena 2016 / 9 Vol. 255

Impact of Dissolved Oxygen in Dilute HF Solution on Material Etch

Kesters, Els, Iwasaki, Akihisa, Le, Quoc Toan, Holsteyns, Frank
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Volume:
255
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.255.251
Date:
September, 2016
File:
PDF, 829 KB
english, 2016
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