Atomic Resolution Quality Control for Fin Oxide Recess by...

Solid State Phenomena 2016 / 9 Vol. 255

Atomic Resolution Quality Control for Fin Oxide Recess by Atomic Resolution Profiler

Kim, Tae Gon, Ryu, Heon Yul, Kenis, Karine, Jo, Ah Jin, Cho, Sang Joon, Park, Sang Il, Schmidt, Sebastian, Irmer, Bernd
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Volume:
255
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.255.304
Date:
September, 2016
File:
PDF, 2.09 MB
english, 2016
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