Fabrication and characterization of dual AFM probe with...

Microelectronic Engineering 2017 / 01 Vol. 168

Fabrication and characterization of dual AFM probe with narrow-gapped silicon tips and switchable cantilevers with magneto-strictive FePd film actuator

Mineta, Takashi, Kawashima, Kenta, Taguchi, Ryoga
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Volume:
168
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2016.10.001
Date:
January, 2017
File:
PDF, 1.87 MB
english, 2017
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