High aspect ratio metal microcasting by hot embossing for...

Microelectronic Engineering 2017 / 05 Vol. 176

High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication

Romano, L., Vila-Comamala, J., Kagias, M., Vogelsang, K., Schift, H., Stampanoni, M., Jefimovs, K.
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Volume:
176
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2016.12.032
Date:
May, 2017
File:
PDF, 1.19 MB
english, 2017
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