Microelectronic Engineering

1

Exploiting the combination of 3D polymer printing and inkjet Ag-nanoparticle printing for advanced packaging

Krivec, Matic, Roshanghias, Ali, Abram, Anže, Binder, Alfred

Journal:

Year:

2017

Language:

english

File:

PDF, 662 KB

english, 2017

2

High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication

Romano, L., Vila-Comamala, J., Kagias, M., Vogelsang, K., Schift, H., Stampanoni, M., Jefimovs, K.

Journal:

Microelectronic Engineering

Year:

2017

Language:

english

File:

PDF, 1.19 MB

english, 2017

3

Complex 3D structures via double imprint of hybrid structures and sacrificial mould techniques

Steinberg, Christian, Rumler, Maximilian, Runkel, Manuel, Papenheim, Marc, Wang, Si, Mayer, Andre, Becker, Marco, Rommel, Mathias, Scheer, Hella-Christin

Journal:

Microelectronic Engineering

Year:

2017

Language:

english

File:

PDF, 852 KB

english, 2017

4

Fabrication of photonic integrated circuits in silicon nitride using substrate conformal imprint lithography

Kim, J.W., Chmielak, B., Lerch, H., Plachetka, U.

Journal:

Microelectronic Engineering

Year:

2017

Language:

english

File:

PDF, 833 KB

english, 2017

5

High throughput soft embossing process for micro-patterning of PEDOT thin films

Fanzio, Paola, Cagliani, Alberto, Peterffy, Kristof G., Sasso, Luigi

Journal:

Microelectronic Engineering

Year:

2017

Language:

english

File:

PDF, 2.02 MB

english, 2017

6

Effect of rotational speed of an electromagnetic stirrer on neodymium-doped yttrium aluminum garnet nanoparticle size during co-precipitation

Sheu, Hung-Hua, Jian, Shun-Yi, Lin, Tzu-Te, Lee, Ya-Wei

Journal:

Microelectronic Engineering

Year:

2017

Language:

english

File:

PDF, 1.27 MB

english, 2017

7

Growth of ZnO nanowires on multi-layered polymer structures fabricated by UV liquid transfer imprint lithography

Park, Sooyeon, Moore, Sean A., Song, In-Hyouk, You, Byoung Hee, Lee, Moo-Yeon, Kim, Namwon

Journal:

Microelectronic Engineering

Year:

2017

Language:

english

File:

PDF, 1.17 MB

english, 2017

8

A new approach to determine development model parameters by employing the isotropy of the development process

Kaspar, C., Butschke, J., Irmscher, M., Martens, S., Burghartz, J.N.

Journal:

Microelectronic Engineering

Year:

2017

Language:

english

File:

PDF, 1.10 MB

english, 2017

9

Silver-based reactive ink for inkjet-printing of conductive lines on textiles

Kastner, Julia, Faury, Thomas, Außerhuber, Helene M., Obermüller, Thomas, Leichtfried, Hans, Haslinger, Michael J., Liftinger, Eva, Innerlohinger, Josef, Gnatiuk, Iurii, Holzinger, Dieter, Lederer, Th

Journal:

Microelectronic Engineering

Year:

2017

Language:

english

File:

PDF, 3.43 MB

english, 2017

10

Replication of micro-sized pillars in polypropylene using the extrusion coating process

Okulova, Nastasia, Johansen, Peter, Christensen, Lars, Taboryski, Rafael

Journal:

Microelectronic Engineering

Year:

2017

Language:

english

File:

PDF, 933 KB

english, 2017

11

Imprint strategy for directed self-assembly of block copolymers

Mayer, Andre, Blenskens, Dainel, Rond, Johannes, Steinberg, Christian, Papenheim, Marc, Wang, Si, Zajadacz, Joachim, Zimmer, Klaus, Scheer, Hella-Christin

Journal:

Microelectronic Engineering

Year:

2017

Language:

english

File:

PDF, 749 KB

english, 2017

12

Quantitative AC - Kelvin Probe Force Microscopy

Kohl, Dominik, Mesquida, Patrick, Schitter, Georg

Journal:

Microelectronic Engineering

Year:

2017

Language:

english

File:

PDF, 894 KB

english, 2017

13

Consecutive imprinting performance of large area UV nanoimprint lithography using Bi-layer soft stamps in ambient atmosphere

Si, Shuhao, Hoffmann, Martin

Journal:

Microelectronic Engineering

Year:

2017

Language:

english

File:

PDF, 3.97 MB

english, 2017

14

A simple fabrication process for stepwise gradient wrinkle pattern with spatially-controlled wavelength based on sequential oxygen plasma treatment

Lee, Jeong Su, Hong, Hyeonjun, Park, Sung Jea, Lee, Seong Jin, Kim, Dong Sung

Journal:

Microelectronic Engineering

Year:

2017

Language:

english

File:

PDF, 876 KB

english, 2017

15

Fabrication of diamond diffraction gratings for experiments with intense hard x-rays

Makita, M., Karvinen, P., Guzenko, V.A., Kujala, N., Vagovic, P., David, C.

Journal:

Microelectronic Engineering

Year:

2017

Language:

english

File:

PDF, 1.61 MB

english, 2017

16

Nanostructuring methylammonium lead iodide perovskite by ultrafast nano imprinting lithography

Cefarin, Nicola, Cian, Alessandro, Sonato, Agnese, Sovernigo, Enrico, Suran, Fabio, Teklu, Zekarias, Zanut, Alessandra, Pozzato, Alessandro, Tormen, Massimo

Journal:

Microelectronic Engineering

Year:

2017

Language:

english

File:

PDF, 1.04 MB

english, 2017

17

Fe- or Fe oxide-embedded anodic alumina membrane for nanocarbon growth―fabrication of membrane and observation of initial nanocarbon growth

Kondoh, Eiichi, Tamekuni, Shigeaki, Watanabe, Mitsuhiro, Okubo, Soichiro, Hikata, Takeshi, Nakayama, Akira

Journal:

Microelectronic Engineering

Year:

2017

Language:

english

File:

PDF, 1.48 MB

english, 2017

18

MoS2 nanosheets supported on reduced carboxylic multi-walled carbon nanotubes: An advanced catalyst for the hydrogen evolution reaction

Zhou, Jing, Cao, Jiamu, Zou, Yuezhang, Zhang, Yufeng, Liu, Xiaowei

Journal:

Microelectronic Engineering

Year:

2017

Language:

english

File:

PDF, 2.44 MB

english, 2017

19

Fabrication and characterization of micromechanical bridges with strain sensors deposited using focused electron beam induced technology

Moczała, M., Kwoka, K., Piasecki, T., Kunicki, P., Sierakowski, A., Gotszalk, T.

Journal:

Microelectronic Engineering

Year:

2017

Language:

english

File:

PDF, 1.01 MB

english, 2017

20

Direct bonding of ALD Al2O3 to silicon nitride thin films

Laganá, S., Mikkelsen, E.K., Marie, R., Hansen, O., Mølhave, K.

Journal:

Microelectronic Engineering

Year:

2017

Language:

english

File:

PDF, 1.16 MB

english, 2017

21

Suspended microstructures of epoxy based photoresists fabricated with UV photolithography

Hemanth, Suhith, Anhøj, Thomas A., Caviglia, Claudia, Keller, Stephan S.

Journal:

Microelectronic Engineering

Year:

2017

Language:

english

File:

PDF, 1.30 MB

english, 2017

22

Vacuum ultraviolet light assisted bonding and nanoscale pattern transfer method for polydimethylsiloxane

Hashimoto, Yuki, Mogi, Katsuo, Yamamoto, Takatoki

Journal:

Microelectronic Engineering

Year:

2017

Language:

english

File:

PDF, 838 KB

english, 2017

23

Editorial Board

Journal:

Microelectronic Engineering

Year:

2017

File:

PDF, 34 KB

2017

24

Author Index

Journal:

Microelectronic Engineering

Year:

2017

Language:

english

File:

PDF, 107 KB

english, 2017

25

Preface

Brückl, Hubert, Mühlberger, Michael

Journal:

Microelectronic Engineering

Year:

2017

Language:

english

File:

PDF, 148 KB

english, 2017

26

Volume 176

Exploiting the combination of 3D polymer printing and inkjet Ag-nanoparticle printing for advanced packaging

High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication

Complex 3D structures via double imprint of hybrid structures and sacrificial mould techniques

Fabrication of photonic integrated circuits in silicon nitride using substrate conformal imprint lithography

High throughput soft embossing process for micro-patterning of PEDOT thin films

Effect of rotational speed of an electromagnetic stirrer on neodymium-doped yttrium aluminum garnet nanoparticle size during co-precipitation

Growth of ZnO nanowires on multi-layered polymer structures fabricated by UV liquid transfer imprint lithography

A new approach to determine development model parameters by employing the isotropy of the development process

Silver-based reactive ink for inkjet-printing of conductive lines on textiles

Replication of micro-sized pillars in polypropylene using the extrusion coating process

Imprint strategy for directed self-assembly of block copolymers

Quantitative AC - Kelvin Probe Force Microscopy

Consecutive imprinting performance of large area UV nanoimprint lithography using Bi-layer soft stamps in ambient atmosphere

A simple fabrication process for stepwise gradient wrinkle pattern with spatially-controlled wavelength based on sequential oxygen plasma treatment

Fabrication of diamond diffraction gratings for experiments with intense hard x-rays

Nanostructuring methylammonium lead iodide perovskite by ultrafast nano imprinting lithography

Fe- or Fe oxide-embedded anodic alumina membrane for nanocarbon growth―fabrication of membrane and observation of initial nanocarbon growth

MoS2 nanosheets supported on reduced carboxylic multi-walled carbon nanotubes: An advanced catalyst for the hydrogen evolution reaction

Fabrication and characterization of micromechanical bridges with strain sensors deposited using focused electron beam induced technology

Direct bonding of ALD Al2O3 to silicon nitride thin films

Suspended microstructures of epoxy based photoresists fabricated with UV photolithography

Vacuum ultraviolet light assisted bonding and nanoscale pattern transfer method for polydimethylsiloxane

Editorial Board

Author Index

Preface

Table of Contents