AlGaN/GaN MIS-HEMTs of Very-Low ${V}_{\sf {{th}}}$...

AlGaN/GaN MIS-HEMTs of Very-Low ${V}_{\sf {{th}}}$ Hysteresis and Current Collapse With In-Situ Pre-Deposition Plasma Nitridation and LPCVD-Si3N4 Gate Insulator

Zhang, Zhili, Li, Weiyi, Fu, Kai, Yu, Guohao, Zhang, Xiaodong, Zhao, Yanfei, Sun, Shichuang, Song, Liang, Deng, Xuguang, Xing, Zheng, Yang, Lei, Ji, Rongkun, Zeng, Chunhong, Fan, Yaming, Dong, Zhihua,
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Volume:
38
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2016.2636136
Date:
February, 2017
File:
PDF, 854 KB
english, 2017
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