Fabrication of photonic integrated circuits in silicon...

Microelectronic Engineering 2017 / 05 Vol. 176

Fabrication of photonic integrated circuits in silicon nitride using substrate conformal imprint lithography

Kim, J.W., Chmielak, B., Lerch, H., Plachetka, U.
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Volume:
176
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2017.01.008
Date:
May, 2017
File:
PDF, 833 KB
english, 2017
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