Atomic composition and electrical characteristics of epitaxial CVD diamond layers doped with boron
Surovegina, E. A., Demidov, E. V., Drozdov, M. N., Murel, A. V., Khrykin, O. I., Shashkin, V. I., Lobaev, M. A., Gorbachev, A. M., Viharev, A. L., Bogdanov, S. A., Isaev, V. A., Muchnikov, A. B., CherVolume:
50
Language:
english
Journal:
Semiconductors
DOI:
10.1134/S1063782616120204
Date:
December, 2016
File:
PDF, 482 KB
english, 2016