Imprint strategy for directed self-assembly of block...

Microelectronic Engineering 2017 / 05 Vol. 176

Imprint strategy for directed self-assembly of block copolymers

Mayer, Andre, Blenskens, Dainel, Rond, Johannes, Steinberg, Christian, Papenheim, Marc, Wang, Si, Zajadacz, Joachim, Zimmer, Klaus, Scheer, Hella-Christin
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Volume:
176
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2017.02.003
Date:
May, 2017
File:
PDF, 749 KB
english, 2017
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