A simple fabrication process for stepwise gradient wrinkle...

Microelectronic Engineering 2017 / 05 Vol. 176

A simple fabrication process for stepwise gradient wrinkle pattern with spatially-controlled wavelength based on sequential oxygen plasma treatment

Lee, Jeong Su, Hong, Hyeonjun, Park, Sung Jea, Lee, Seong Jin, Kim, Dong Sung
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Volume:
176
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2017.02.022
Date:
May, 2017
File:
PDF, 876 KB
english, 2017
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