TiN Metal Hardmask Etch Residues Removal with AlN Etch

Solid State Phenomena 2016 / 9 Vol. 255

TiN Metal Hardmask Etch Residues Removal with AlN Etch

Cui, Hua
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Volume:
255
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.255.242
Date:
September, 2016
File:
PDF, 388 KB
english, 2016
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