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Polymer bonding of GaN crystal layer on silicon substrate for micro mechanical resonator applications
Sasaki, Takashi, Hayakawa, Yuta, Hane, KazuhiroVolume:
23
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-3075-0
Date:
July, 2017
File:
PDF, 1.47 MB
english, 2017