Direct bonding of ALD Al2O3 to silicon nitride thin films

Microelectronic Engineering 2017 / 05 Vol. 176

Direct bonding of ALD Al2O3 to silicon nitride thin films

Laganá, S., Mikkelsen, E.K., Marie, R., Hansen, O., Mølhave, K.
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Volume:
176
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2017.01.038
Date:
May, 2017
File:
PDF, 1.16 MB
english, 2017
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