Optimization of EUV Reticle Cleaning by Evaluation of...

Solid State Phenomena 2016 / 9 Vol. 255

Optimization of EUV Reticle Cleaning by Evaluation of Chemistries on Wafer-Based Mimic Test Structures

Pacco, Antoine, Dattilo, D., Jonckheere, R., Rip, Jens, Dietze, U., Kruemberg, J., Holsteyns, Frank
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Volume:
255
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.255.357
Date:
September, 2016
File:
PDF, 3.52 MB
english, 2016
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