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Fast Diffusion in Germanium and Silicon Investigated by Lamp-Based Rapid Thermal Annealing
Stolwijk, Nicolaas, Lerner, Ludmila, Giese, Axel, Lerch, WilfriedVolume:
573-574
Year:
2008
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.573-574.35
File:
PDF, 334 KB
english, 2008