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Volume 573-574
Main
Materials Science Forum
Volume 573-574
Materials Science Forum
Volume 573-574
1
Cleaning of Silicon Surfaces for Nanotechnology
Senftleben, Oliver
,
Baumgärtner, Hermann
,
Eisele, Ignaz
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 8.97 MB
Your tags:
english, 2008
2
A Growth Kinetics Model for the Radical Oxidation of Silicon
Storbeck, Olaf
,
Pethe, Wieland
,
Hayn, Regina
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 328 KB
Your tags:
english, 2008
3
Implant Annealing – An Evolution from Soak over Spike to Millisecond Annealing
Paul, Silke
,
Lerch, Wilfried
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 1.07 MB
Your tags:
english, 2008
4
Model Based Measurement in Advanced Rapid Thermal Processing
Merkl, Christoph
,
Bremensdorfer, Rolf
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 411 KB
Your tags:
english, 2008
5
Heavy Water in Gate Stack Processing
Pap, Andrea E.
,
Dücső, Csaba
,
Kamarás, Katalin
,
Battistig, Gábor
,
Bársony, István
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 809 KB
Your tags:
english, 2008
6
Production Worthy ALD in Batch Reactors
Gschwandtner, Alexander
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 842 KB
Your tags:
english, 2008
7
Rapid Thermal Processing and the Control of Oxygen Precipitation Behaviour in Silicon Wafers
Falster, Robert
,
Voronkov, Vladimir
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 1.05 MB
Your tags:
english, 2008
8
Ultra-Rapid Thermal Process for ULSIs
Suguro, Kyoichi
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 2.22 MB
Your tags:
english, 2008
9
Doping Strategies for FinFETs
Pawlak, Bartek J.
,
Duffy, Ray
,
De Keersgieter, An
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 2.55 MB
Your tags:
english, 2008
10
Advanced Annealing Schemes for High-Performance SOI Logic Technologies
Feudel, Thomas
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 647 KB
Your tags:
english, 2008
11
High Temperature RTP Application in SOI Manufacturing
Maleville, Christophe
,
Neyret, Eric
,
Delprat, Daniel
,
Ecarnot, Ludovic
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 1.92 MB
Your tags:
english, 2008
12
Advanced Gate Dielectric Development for VLSI Technology
Ma, Yi
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 492 KB
Your tags:
english, 2008
13
Ultra Shallow Depth Profiling with SIMS
Ehrke, H. Ulrich
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 436 KB
Your tags:
english, 2008
14
A Light-Induced Annealing of Silicon Implanted Layers
Lojek, Bo
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 394 KB
Your tags:
english, 2008
15
Short Time Thermal Processing: From Electronics via Photonics to Pipe Organs of the 17th Century
Skorupa, Wolfgang
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 526 KB
Your tags:
english, 2008
16
Evolution of Commercial RTP Modules
Peuse, Bruce
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 369 KB
Your tags:
english, 2008
17
Investigation of Ultra Thin Thermal Nitrided Gate Dielectrics in Comparison to Plasma Nitrided Gate Dielectrics for High-Performance Logic Application for 65nm
Trentzsch, Martin
,
Golz, Christian
,
Wieczorek, Karsten
,
Stephan, Rolf
,
Mantei, Tilo
,
Bayha, Boris
,
Ohsiek, Susanne
,
Raab, Michael
,
Nényei, Zsolt
,
Lerch, Wilfried
,
Niess, Jürgen
,
Dietl, Waltraud
,
Kirch
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 540 KB
Your tags:
english, 2008
18
Laser Annealing of Implanted Semiconductor Layers – One Bridge to Nano-Processing
Geiler, Hans D.
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 1.37 MB
Your tags:
english, 2008
19
RTP Requirements for CMOS Integration of Dual Work Function Phase Controlled Ni-FUSI (Fully Silicided) Gates with Simultaneous Silicidation of nMOS (NiSi) and pMOS (Ni-Rich Silicide) Gates on HfSiON
Lauwers, Anne
,
Kittl, Jorge
,
Maex, Karen
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 1.63 MB
Your tags:
english, 2008
20
The Expanding Role of Rapid Thermal Processing in CMOS Manufacturing
Nakos, Jim
,
Shepard, Joe
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 715 KB
Your tags:
english, 2008
21
Modeling and Simulation of Advanced Annealing Processes
Martinez-Limia, Alberto
,
Pichler, Peter
,
Steen, Christian
,
Paul, Silke
,
Lerch, Wilfried
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 2.66 MB
Your tags:
english, 2008
22
Ultra-Shallow Junction Formation Using Rapid Thermal Processing
Jain, Amitabh
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 641 KB
Your tags:
english, 2008
23
Conduction Heating in RTP Fast, and Pattern-Independent
Granneman, Ernst
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 1.30 MB
Your tags:
english, 2008
24
An Overview of ms Annealing for Deep Sub-Micron Activation
Gelpey, Jeffrey C.
,
McCoy, Steve
,
Camm, Dave
,
Lerch, Wilfried
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 540 KB
Your tags:
english, 2008
25
Advanced Millisecond Annealing Technologies and its Applications and Concerns on Advanced Logic LSI Fabrication Processes
Kase, Masataka
,
Yamamoto, Tomonari
,
Kubo, Tomohiro
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 654 KB
Your tags:
english, 2008
26
Extended Defects Evolution in Pre-Amorphised Silicon after Millisecond Flash Anneals
Cristiano, Fuccio
,
Bazizi, El Mehdi
,
Fazzini, Pier Francesco
,
Boninelli, Simona
,
Duffy, Ray
,
Pakfar, Ardechir
,
Paul, Silke
,
Lerch, Wilfried
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 1.92 MB
Your tags:
english, 2008
27
A Short History of Pattern Effects in Thermal Processing
Timans, Paul J.
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 704 KB
Your tags:
english, 2008
28
Vacancy Engineering – An Ultra-Low Thermal Budget Method for High-Concentration 'Diffusionless' Implantation Doping
Cowern, Nicholas E.B.
,
Smith, Andrew J.
,
Bennett, Nicholas
,
Sealy, Brian J.
,
Gwilliam, Russell
,
Webb, Roger P.
,
Colombeau, Benjamin
,
Paul, Silke
,
Lerch, Wilfried
,
Pakfar, Ardechir
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 468 KB
Your tags:
english, 2008
29
High-K: Latest Developments and Perspectives
Bauer, Anton J.
,
Lemberger, Martin
,
Erlbacher, Tobias
,
Weinreich, Wenke
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 1.99 MB
Your tags:
english, 2008
30
Fast Diffusion in Germanium and Silicon Investigated by Lamp-Based Rapid Thermal Annealing
Stolwijk, Nicolaas
,
Lerner, Ludmila
,
Giese, Axel
,
Lerch, Wilfried
Journal:
Materials Science Forum
Year:
2008
Language:
english
File:
PDF, 334 KB
Your tags:
english, 2008
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