Vacuum ultraviolet light assisted bonding and nanoscale...

Microelectronic Engineering 2017 / 05 Vol. 176

Vacuum ultraviolet light assisted bonding and nanoscale pattern transfer method for polydimethylsiloxane

Hashimoto, Yuki, Mogi, Katsuo, Yamamoto, Takatoki
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Volume:
176
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2017.04.005
Date:
May, 2017
File:
PDF, 838 KB
english, 2017
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