Static fault localization of subtle metallization defects...

Microelectronics Reliability 2017 / 06 Vol. 73

Static fault localization of subtle metallization defects using near infrared photon emission microscopy

Quah, A.C.T., Nagalingam, D., Moon, S., Susanto, E., Ang, G.B., Neo, S.P., Lam, J.C., Mai, Z.H.
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Volume:
73
Language:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2017.04.010
Date:
June, 2017
File:
PDF, 6.71 MB
english, 2017
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