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Adaptive Control and Experiment of a Maglev Guiding System for Wafer Transportation
Chen, Mei-Yung, Wu, Kun-Nan, Fu, Li-ChenVolume:
31
Language:
english
Journal:
IFAC Proceedings Volumes
DOI:
10.1016/s1474-6670(17)40035-8
Date:
September, 1998
File:
PDF, 1.46 MB
english, 1998