Dynamic Modeling and High Precision Tracking Control of Atomic Force Microscope Under High Data Sampling Rate
Hsu, Su-Hau, Fu, Li-Chen, Lin, Yin-ShiVolume:
31
Language:
english
Journal:
IFAC Proceedings Volumes
DOI:
10.1016/s1474-6670(17)39999-8
Date:
September, 1998
File:
PDF, 1.19 MB
english, 1998