Support system for fine focusing and astigmatism correction...

Support system for fine focusing and astigmatism correction using an auditory signal in scanning electron microscopy

Oho, Eisaku, Suzuki, Kazuhiko, Yamazaki, Sadao
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Volume:
66
Language:
english
Journal:
Journal of Electron Microscopy
DOI:
10.1093/jmicro/dfx007
Date:
June, 2017
File:
PDF, 1.61 MB
english, 2017
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