![](/img/cover-not-exists.png)
Development of Si/SiO2 Multilayer Type AFM Tip Characterizers
Takenaka, Hisataka, Hatayama, Masatoshi, Ito, Hisashi, Ohchi, Tadayuki, Takano, Akio, Kurosawa, Satoru, Itoh, Hiroshi, Ichimura, ShingoVolume:
17
Year:
2011
Language:
english
Journal:
Journal of Surface Analysis
DOI:
10.1384/jsa.17.264
File:
PDF, 369 KB
english, 2011