Fabrication Method for Nanocluster Superatoms with...

Journal of the Vacuum Society of Japan 2017 Vol. 60; Iss. 9

Fabrication Method for Nanocluster Superatoms with High-Power Impulse Magnetron Sputtering

TSUNOYAMA, Hironori, TONA, Masahide, TSUKAMOTO, Keizo, NAKAJIMA, Atsushi
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Volume:
60
Year:
2017
Journal:
Journal of the Vacuum Society of Japan
DOI:
10.3131/jvsj2.60.352
File:
PDF, 1.73 MB
2017
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