Development of Pulse Power Supplies as High Power Impulse Magnetron Sputtering (HiPIMS) Equipment Components for Medical Diamond Like Carbon (DLC) Film Fabrication Processes
KUROIWA, Masahide, NAKATANI, TatsuyukiVolume:
60
Year:
2017
Journal:
Journal of the Vacuum Society of Japan
DOI:
10.3131/jvsj2.60.372
File:
PDF, 1.08 MB
2017