Development of Pulse Power Supplies as High Power Impulse...

Development of Pulse Power Supplies as High Power Impulse Magnetron Sputtering (HiPIMS) Equipment Components for Medical Diamond Like Carbon (DLC) Film Fabrication Processes

KUROIWA, Masahide, NAKATANI, Tatsuyuki
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Volume:
60
Year:
2017
Journal:
Journal of the Vacuum Society of Japan
DOI:
10.3131/jvsj2.60.372
File:
PDF, 1.08 MB
2017
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