Characterization of Carbon Thin Films Prepared by High...

Journal of the Vacuum Society of Japan 2017 Vol. 60; Iss. 9

Characterization of Carbon Thin Films Prepared by High Power Impulse Magnetron Sputtering

NAWACHI, Norio, ITOH, Koichi, ISAGI, Yosuke, YOSHIDA, Yoshiaki, OKAMOTO, Keishi, NAKATANI, Tatsuyuki
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Volume:
60
Year:
2017
Journal:
Journal of the Vacuum Society of Japan
DOI:
10.3131/jvsj2.60.341
File:
PDF, 659 KB
2017
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