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“Plug-up”—a new concept for fabricating SOI MEMS devices
J. Kiihamäki, J. Dekker, P. Pekko, H. Kattelus, T. Sillanpää, T. MattilaVolume:
10
Language:
english
Pages:
5
DOI:
10.1007/bf02637101
Date:
August, 2004
File:
PDF, 940 KB
english, 2004