Volume 10; Issue 5

Main
Microsystem Technologies
Volume 10; Issue 5

Microsystem Technologies

Volume 10; Issue 5

1

Microsystem technologies: Foreword to special issue on design, test, integration and packaging of MEMS/MOEMS, 2003

Bernard Courtois, Bernd Michel

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 44 KB

english, 2004

2

“Plug-up”—a new concept for fabricating SOI MEMS devices

J. Kiihamäki, J. Dekker, P. Pekko, H. Kattelus, T. Sillanpää, T. Mattila

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 940 KB

english, 2004

3

New electroforming technology pressure aid for LIGA process

T. -H. Tsai, H. Yang, R. Chein

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 2.84 MB

english, 2004

4

SU8 resist plasma etching and its optimisation

G. Hong, A. S. Holmes, M. E. Heaton

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 711 KB

english, 2004

5

Thin film formation on non-planar surface with use of spray coating fabrication

M. Ichiki, L. Zhang, Z. Yang, T. Ikehara, R. Maeda

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 785 KB

english, 2004

6

Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process

C. Rusu, H. Jansen, R. Gunn, A. Witvrouw

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 2.64 MB

english, 2004

7

Bonding of polymer microstructures by UV irradiation and subsequent welding at low temperatures

R. Truckenmüller, P. Henzi, D. Herrmann, V. Saile, W. K. Schomburg

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 759 KB

english, 2004

8

Modular parametric finite element modelling for reliability-studies in electronic and mems packaging

B. Wunderle, J. Auersperg, V. Großer, E. Kaulfersch, O. Wittler, B. Michel

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 2.09 MB

english, 2004

9

Feasibility of a flip-chip approach to integrate an IR filter and an IR detector in a future gas detection cell

L. Fonseca, E. Cabruja, C. Calaza, R. Rubio, J. Santander, E. Figueras, I. Gràcia, C. Cané, M. Moreno, S. Marco

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 1.97 MB

english, 2004

10

Dynamic modeling of interactions between fields and matter in MEMS devices

K. Zeng, Z. Liu, J. G. Korvink

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 602 KB

english, 2004

11

Parallel-beams/lever electrothermal out-of-plane actuator

S. Deladi, G. Krijnen, M. C. Elwenspoek

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 1.43 MB

english, 2004

12

Design and simulation of MEMS optical switch using photonic bandgap crystal

H. G. Teo, A. Q. Liu, J. Singh, M. B. Yu, T. Bourouina

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 1.17 MB

english, 2004

13

Yield strength of thin-film parylene-C

C. Y. Shih, T. A. Harder, Y. C. Tai

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 926 KB

english, 2004

14

Fracture behaviour of single crystal silicon microstructures

F. Favalli Meroni, E. Mazza

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 1.44 MB

english, 2004

15

Ensuring repeatability in LIGA mold insert fabrication

J. Schulz, K. Bade, M. Guttmann, L. Hahn, A. Janssen, U. Köhler, P. Meyer, F. Winkler

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 1.24 MB

english, 2004

16

Development of a novel self-sensitive atomic force microscope for nondestructive measurement of micro vertical surfaces

T. Kobayashi, Y. Murakoshi, R. Maeda

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 958 KB

english, 2004

17

Design, fabrication, and test of a peristaltic micropump

M. Knight, J. House

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 846 KB

english, 2004

18

New aspects of simulation in hot embossing

M. Worgull, M. Heckele

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 1.58 MB

english, 2004

19

SU8 resist plasma etching and its optimisation

G. Hong, A.S. Holmes, M.E. Heaton

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 194 KB

english, 2004

20

“Plug-up”–a new concept for fabricating SOI MEMS devices

J. Kiihamäki, J. Dekker, P. Pekko, H. Kattelus, T. Sillanpää, T. Mattila

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 320 KB

english, 2004

21

Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process

A. Witvrouw, C. Rusu, H. Jansen, R. Gunn

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 775 KB

english, 2004

22

Design and simulation of MEMS optical switch using photonic bandgap crystal

H.G. Teo, A.Q. Liu, J. Singh, M.B. Yu, T. Bourouina

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 469 KB

english, 2004

23

Dynamic modeling of interactions between fields and matter in MEMS devices

K. Zeng, Z. Liu, J.G. Korvink

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 337 KB

english, 2004

24

New aspects of simulation in hot embossing

M. Worgull, M. Heckele

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 616 KB

english, 2004

25

Microsystem Technologies: Foreword to special issue on Design, Test, Integration and Packaging of MEMS/MOEMS, 2003

Bernard Courtois, Bernd Michel

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 62 KB

english, 2004

26

Feasibility of a flip-chip approach to integrate an IR filter and an IR detector in a future gas detection cell

L. Fonseca, E. Cabruja, C. Calaza, R. Rubio, J. Santander, E. Figueras, I. Gràcia, C. Cané, M. Moreno, S. Marco

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 399 KB

english, 2004

27

Bonding of polymer microstructures by UV irradiation and subsequent welding at low temperatures

R. Truckenmüller, P. Henzi, D. Herrmann, V. Saile, W.K. Schomburg

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 315 KB

english, 2004

28

Parallel-beams/lever electrothermal out-of-plane actuator

S. Deladi, G. Krijnen, M.C. Elwenspoek

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 417 KB

english, 2004

29

Ensuring repeatability in LIGA mold insert fabrication

J. Schulz, K. Bade, M. Guttmann, L. Hahn, A. Janssen, U. Köhler, P. Meyer, F. Winkler

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 346 KB

english, 2004

30

New electroforming technology pressure aid for LIGA process

T.-H. Tsai, H. Yang, R. Chein

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 672 KB

english, 2004

31

Modular parametric finite element modelling for reliability-studies in electronic and mems packaging

B. Wunderle, J. Auersperg, V. Großer, E. Kaulfersch, O. Wittler, B. Michel

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 1.03 MB

english, 2004

32

Design, fabrication, and test of a peristaltic micropump

M. Knight, J. House

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 370 KB

english, 2004

33

Yield strength of thin-film parylene-C

C.Y. Shih, T.A. Harder, Y.C. Tai

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 425 KB

english, 2004

34

Development of a novel self-sensitive atomic force microscope for nondestructive measurement of micro vertical surfaces

T. Kobayashi, Y. Murakoshi, R. Maeda

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 365 KB

english, 2004

35

Thin film formation on non-planar surface with use of spray coating fabrication

M. Ichiki, L. Zhang, Z. Yang, T. Ikehara, R. Maeda

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 279 KB

english, 2004

36

Fracture behaviour of single crystal silicon microstructures

F. Favalli Meroni, E. Mazza

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 446 KB

english, 2004

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