Fracture behaviour of single crystal silicon...

Microsystem Technologies 2004 / 08 Vol. 10; Iss. 5

Fracture behaviour of single crystal silicon microstructures

F. Favalli Meroni, E. Mazza
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Volume:
10
Language:
english
Pages:
7
DOI:
10.1007/bf02637113
Date:
August, 2004
File:
PDF, 1.44 MB
english, 2004
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