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Determination of Young’s modulus and residual stress of electroless nickel using test structures fabricated in a new surface micromachining process
S. Roy, S. Furukawa, M. MehreganyVolume:
2
Language:
english
Pages:
5
DOI:
10.1007/bf02739537
Date:
March, 1995
File:
PDF, 1.15 MB
english, 1995