Volume 2; Issue 1

Microsystem Technologies

Volume 2; Issue 1
3

Micro liquid dosing system

R. Roßberg, B. Schmidt, S. Büttgenbach
Journal:
Microsystem Technologies
Year:
1995
Language:
english
File:
PDF, 802 KB
english, 1995
4

Finite element simulation of microstructure demolding as part of the LIGA process

N. Huber, Ch. Tsakmakis
Journal:
Microsystem Technologies
Year:
1995
Language:
english
File:
PDF, 657 KB
english, 1995
5

Electromagetically driven microvalve

K. Yanagisawa, H. Kuwano, A. Tago
Journal:
Microsystem Technologies
Year:
1995
Language:
english
File:
PDF, 900 KB
english, 1995
8

International Conference on High Aspect-Ratio Microstructure Technology HARMST ’95

P. Bley, W. Menz, H. O. Moser
Journal:
Microsystem Technologies
Year:
1995
Language:
english
File:
PDF, 48 KB
english, 1995
12

Synchrotron radiation analysis of microstructures

N. Mölders, H. O. Moser, W. Menz, P. J. Schilling, V. Saile
Journal:
Microsystem Technologies
Year:
1995
Language:
english
File:
PDF, 738 KB
english, 1995
13

Tribological investigations of LIGA-microstructures

T. Bieger, U. Wallrabe
Journal:
Microsystem Technologies
Year:
1995
Language:
english
File:
PDF, 2.01 MB
english, 1995
15

Dimensional measurement of micro mechanical components with HAR

U. Breitmeier, G. Häusler
Journal:
Microsystem Technologies
Year:
1995
Language:
english
File:
PDF, 610 KB
english, 1995
16

A source of kilovolt X-ray

F. Villa, A. Luccio, M. Zolotorev
Journal:
Microsystem Technologies
Year:
1995
Language:
english
File:
PDF, 284 KB
english, 1995
17

Light optical deformation measurements in microbars with nanometer resolution

E. Mazza, G. Danuser, J. Dual
Journal:
Microsystem Technologies
Year:
1995
Language:
english
File:
PDF, 1.24 MB
english, 1995
19

Stereolithography and microtechniques

S. Zissi, A. Bertsch, J. -Y. Jézéquel, S. Corbel, D. J. Lougnot, J. C. André
Journal:
Microsystem Technologies
Year:
1995
Language:
english
File:
PDF, 637 KB
english, 1995
20

Fabrication of LIGA-acceleration sensors by aligned molding

A. Both, W. Bacher, M. Heckele, K. -D. Müller, R. Ruprecht, M. Strohrmann
Journal:
Microsystem Technologies
Year:
1995
Language:
english
File:
PDF, 659 KB
english, 1995
22

Fabrication of monolithic integrated fiber-lens connector arrays by deep proton irradiation

M. Kufner, S. Kufner
Journal:
Microsystem Technologies
Year:
1995
Language:
english
File:
PDF, 805 KB
english, 1995
23

The strategic development of HARM manufacturing technologies

S. T. Walsh, R. Boylan, R. Warrington, W. Carr, J. Elders
Journal:
Microsystem Technologies
Year:
1995
Language:
english
File:
PDF, 864 KB
english, 1995
24

LIGA technology in BSRF

E. Tang, F. Yi, M. Jin
Journal:
Microsystem Technologies
Year:
1995
Language:
english
File:
PDF, 717 KB
english, 1995
25

Development of ceramic microstructures

H. -J. Ritzhaupt-Kleissl, W. Bauer, E. Günther, J. Laubersheimer, J. Haußelt
Journal:
Microsystem Technologies
Year:
1995
Language:
english
File:
PDF, 1023 KB
english, 1995
26

Ceramic microstructures and potential applications

R. Knitter, E. Günther, C. Odemer, U. Maciejewski
Journal:
Microsystem Technologies
Year:
1995
Language:
english
File:
PDF, 923 KB
english, 1995
27

A variable reluctance stepping microdynamometer

T. R. Christenson, H. Guckel, J. Klein
Journal:
Microsystem Technologies
Year:
1995
Language:
english
File:
PDF, 917 KB
english, 1995
28

The micromilling process for high aspect ratio microstructures

C. R. Friedrich, M. J. Vasile
Journal:
Microsystem Technologies
Year:
1995
Language:
english
File:
PDF, 1.08 MB
english, 1995
29

Movable microstructures made by a sub-micron LIGA process

M. W. Börner, M. Kohl, F. J. Pantenburg, W. Bacher, H. Hein, W. K. Schomburg
Journal:
Microsystem Technologies
Year:
1995
Language:
english
File:
PDF, 1.13 MB
english, 1995
30

LIGA and LIGA-like processing with high energy photons

H. Guckel
Journal:
Microsystem Technologies
Year:
1995
Language:
english
File:
PDF, 683 KB
english, 1995
31

LIGA activity in Taiwan

Y. Cheng
Journal:
Microsystem Technologies
Year:
1995
Language:
english
File:
PDF, 597 KB
english, 1995
32

Combination of LIGA with other microstructure technologies

W. Menz, W. Bacher, W. Bier, O. F. Hagena, J. Mohr, D. Seidel
Journal:
Microsystem Technologies
Year:
1995
Language:
english
File:
PDF, 1.18 MB
english, 1995
33

Knowledge based support for manufacturing of microstructures

K. P. Scherer, P. Buchberger, H. Eggert, P. Stiller, U. Stucky
Journal:
Microsystem Technologies
Year:
1995
Language:
english
File:
PDF, 388 KB
english, 1995
34

The study of LIGA technique at NSRL

Y. Tian, Y. Hong, S. Fu, Y. Hu, Y. Kan, X. Tao
Journal:
Microsystem Technologies
Year:
1995
Language:
english
File:
PDF, 451 KB
english, 1995
36

Electrochemical post-processing of LIGA structures

S. Akkaraju, Y. M. Desta, B. Q. Li, M. C. Murphy
Journal:
Microsystem Technologies
Year:
1995
Language:
english
File:
PDF, 665 KB
english, 1995
37

Molding of LIGA microstructures from fluorinated polymers

R. Ruprecht, H. Kalb, B. Kowanz, W. Bacher
Journal:
Microsystem Technologies
Year:
1995
Language:
english
File:
PDF, 647 KB
english, 1995
38

Application of deep reactive ion etching for silicon angular rate sensor

J. Choi, K. Minami, M. Esashi
Journal:
Microsystem Technologies
Year:
1995
Language:
english
File:
PDF, 1.07 MB
english, 1995
39

Design and simulation of high aspect ratio motion sensors

L. Yao, E. Chowanietz, M. McCormick, A. Lees
Journal:
Microsystem Technologies
Year:
1995
Language:
english
File:
PDF, 599 KB
english, 1995
40

Experimental determination of mechanical properties of Ni and Ni-Fe microbars

E. Mazza, S. Abel, J. Dual
Journal:
Microsystem Technologies
Year:
1995
Language:
english
File:
PDF, 836 KB
english, 1995