Deposition Rate Control of Ag Thin Films Deposited by...

Journal of the Vacuum Society of Japan 2011 Vol. 54; Iss. 3

Deposition Rate Control of Ag Thin Films Deposited by Sputtering in Argon and Nitrogen Mixed Gases

NAKANISHI, Yuki, KATO, Kazuhiro, OMOTO, Hideo, TOMIOKA, Takao, TAKAMATSU, Atsushi
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Volume:
54
Year:
2011
Journal:
Journal of the Vacuum Society of Japan
DOI:
10.3131/jvsj2.54.207
File:
PDF, 435 KB
2011
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