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Volume 54; Issue 3
Main
Journal of the Vacuum Society of Japan
Volume 54; Issue 3
Journal of the Vacuum Society of Japan
Volume 54; Issue 3
1
Deposition Rate Control of Ag Thin Films Deposited by Sputtering in Argon and Nitrogen Mixed Gases
NAKANISHI, Yuki
,
KATO, Kazuhiro
,
OMOTO, Hideo
,
TOMIOKA, Takao
,
TAKAMATSU, Atsushi
Journal:
Journal of the Vacuum Society of Japan
Year:
2011
File:
PDF, 435 KB
Your tags:
2011
2
Evaluation of Hydrogen Storage Properties of Nano-Carbon Fine Particles Synthesized in Gas Phase by Plasma-Assisted Hot-Filament Chemical Vapor Deposition
KINOSHITA, Yumi
,
KIMURA, Yoshifumi
,
IMANO, Masayoshi
,
MASAKI, Yasuhiro
,
HAYASHI, Yasuaki
Journal:
Journal of the Vacuum Society of Japan
Year:
2011
File:
PDF, 472 KB
Your tags:
2011
3
Evaluation of Hydrogen Storage Properties of Nano-Carbon Fine Particles Synthesized in Gas Phase by Plasma-Assisted Hot-Filament Chemical Vapor Deposition
KINOSHITA, Yumi
,
KIMURA, Yoshifumi
,
IMANO, Masayoshi
,
MASAKI, Yasuhiro
,
HAYASHI, Yasuaki
Journal:
Journal of the Vacuum Society of Japan
Year:
2011
File:
PDF, 472 KB
Your tags:
2011
4
Thickness Distribution of Metal Films by Magnetron Sputtering
SAKAYA, Atsuhiro
,
YAMAZAKI, Toshinari
,
KIKUTA, Toshio
,
YOSHIZAWA, Toshio
,
HIRATE, Hiroshi
,
KIDA, Takayuki
Journal:
Journal of the Vacuum Society of Japan
Year:
2011
File:
PDF, 667 KB
Your tags:
2011
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