Nitrogen-Doped ZnO Film Fabricated Via Rapid...

Nitrogen-Doped ZnO Film Fabricated Via Rapid Low-Temperature Atomic Layer Deposition for High-Performance ZnON Transistors

Ding, Xingwei, Yang, Jun, Qin, Cunping, Yang, Xuyong, Ding, Tao, Zhang, Jianhua
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Volume:
65
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2018.2848275
Date:
August, 2018
File:
PDF, 2.38 MB
english, 2018
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