Study of the Anisotropic Wet Etching of Nanoscale Structures in Alkaline Solutions
Pacco, Antoine, Aabdin, Zainul, Anand, Utkarsh, Rip, Jens, Mirsaidov, Utkur, Holsteyns, FrankVolume:
282
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.282.88
Date:
August, 2018
File:
PDF, 3.23 MB
english, 2018