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Study of the Anisotropic Wet Etching of Nanoscale...

Study of the Anisotropic Wet Etching of Nanoscale Structures in Alkaline Solutions

Pacco, Antoine, Aabdin, Zainul, Anand, Utkarsh, Rip, Jens, Mirsaidov, Utkur, Holsteyns, Frank
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Volume:
282
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.282.88
Date:
August, 2018
File:
PDF, 3.23 MB
english, 2018
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