A SUB-MICRON CMOS PROCESS EMPLOYING TRENCH ISOLATION

ROBERTS, M. C., BOLBOT, P. H., FOSTER, D. J.

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Volume:

Language:

english

Journal:

Le Journal de Physique Colloques

DOI:

10.1051/jphyscol:19884111

Date:

September, 1988

File:

PDF, 1.07 MB

english, 1988

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