Dry etching of GaAs and InP for optoelectronic devices

IEE Proceedings J Optoelectronics 1989 Vol. 136; Iss. 1

Dry etching of GaAs and InP for optoelectronic devices

Carter, A.J., Thomas, B., Morgan, D.V., Bhardwaj, J.K., McQuarrie, A.M., Stephens, M.A.
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Volume:
136
Year:
1989
Language:
english
Journal:
IEE Proceedings J Optoelectronics
DOI:
10.1049/ip-j.1989.0002
File:
PDF, 512 KB
english, 1989
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