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Volume 136; Issue 1
Main
IEE Proceedings J Optoelectronics
Volume 136; Issue 1
IEE Proceedings J Optoelectronics
Volume 136; Issue 1
1
Dry etching of GaAs and InP for optoelectronic devices
Carter, A.J.
,
Thomas, B.
,
Morgan, D.V.
,
Bhardwaj, J.K.
,
McQuarrie, A.M.
,
Stephens, M.A.
Journal:
IEE Proceedings J Optoelectronics
Year:
1989
Language:
english
File:
PDF, 512 KB
Your tags:
english, 1989
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