Observation of heterostructure epitaxy of Pt-doped...

Microelectronic Engineering 2019 / 01 Vol. 205

Observation of heterostructure epitaxy of Pt-doped Ni-monosilicide on Si(001)

Kim, Jinbum, Lee, Hyangsook, Kim, Jung-Hwa, Shin, Ilgyou, Yoo, Jeongho, Kim, Seokhoon, Choi, Seongheum, Kim, Jinyong, Park, Taejin, Kim, Yihwan, Hwang, Kihyun, Lee, Eunha, Kim, Hyoungsub
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Volume:
205
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2018.11.009
Date:
January, 2019
File:
PDF, 1.61 MB
english, 2019
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