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Volume 205
Main
Microelectronic Engineering
Volume 205
Microelectronic Engineering
Volume 205
1
Observation of heterostructure epitaxy of Pt-doped Ni-monosilicide on Si(001)
Kim, Jinbum
,
Lee, Hyangsook
,
Kim, Jung-Hwa
,
Shin, Ilgyou
,
Yoo, Jeongho
,
Kim, Seokhoon
,
Choi, Seongheum
,
Kim, Jinyong
,
Park, Taejin
,
Kim, Yihwan
,
Hwang, Kihyun
,
Lee, Eunha
,
Kim, Hyoungsub
Journal:
Microelectronic Engineering
Year:
2019
Language:
english
File:
PDF, 1.61 MB
Your tags:
english, 2019
2
3D system integration on 300 mm wafer level: High-aspect-ratio TSVs with ruthenium seed layer by thermal ALD and subsequent copper electroplating
Killge, Sebastian
,
Bartusseck, Irene
,
Junige, Marcel
,
Neumann, Volker
,
Reif, Johanna
,
Wenzel, Christian
,
Böttcher, Mathias
,
Albert, Matthias
,
Jürgen Wolf, M.
,
Bartha, Johann W.
Journal:
Microelectronic Engineering
Year:
2019
Language:
english
File:
PDF, 1.68 MB
Your tags:
english, 2019
3
Thermal and radiation chemistry of butyltin oxo hydroxo: A model inorganic photoresist
Frederick, Ryan T.
,
Saha, Sumit
,
Trey Diulus, J.
,
Luo, Feixiang
,
Amador, Jenn M.
,
Li, Mengjun
,
Park, Deok-Hie
,
Garfunkel, Eric L.
,
Keszler, Douglas A.
,
Herman, Gregory S.
Journal:
Microelectronic Engineering
Year:
2019
Language:
english
File:
PDF, 1.12 MB
Your tags:
english, 2019
4
High performance, low temperature processed Hf-In-Zn-O/HfO2 thin film transistors, using PMMA as etch-stop and passivation layer
Pons-Flores, C.A.
,
Mejia, I.
,
Hernandez, I.
,
Garduño, I.
,
Estrada, M.
Journal:
Microelectronic Engineering
Year:
2019
Language:
english
File:
PDF, 818 KB
Your tags:
english, 2019
5
A thermo-activated tactile micro-actuator for displays
Puce, Salvatore
,
Dattoma, Tommaso
,
Rizzi, Francesco
,
Emara, Mohamed
,
Qualtieri, Antonio
,
De Vittorio, Massimo
Journal:
Microelectronic Engineering
Year:
2019
Language:
english
File:
PDF, 1.77 MB
Your tags:
english, 2019
6
Silicon carbide nanowire field effect transistors with high on/off current ratio
Uzun, Ali
,
Teker, Kasif
Journal:
Microelectronic Engineering
Year:
2019
Language:
english
File:
PDF, 1.13 MB
Your tags:
english, 2019
7
Editorial Board
Journal:
Microelectronic Engineering
Year:
2019
File:
PDF, 29 KB
Your tags:
2019
8
Ammonia sorption outgassing and cross contamination ability of Entegris FOUPs evaluation and its volatile acids comparison
González-Aguirre, Paola
,
Hérran, Fernando
,
Moon, Sung-In
,
Tran, Minh-Phuong
,
Lundgren, Jorgen
,
Beitia, Carlos
,
Fontaine, Hervé
Journal:
Microelectronic Engineering
Year:
2019
Language:
english
File:
PDF, 1.35 MB
Your tags:
english, 2019
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