Volume 205

Microelectronic Engineering

Volume 205

1

Observation of heterostructure epitaxy of Pt-doped Ni-monosilicide on Si(001)

Kim, Jinbum, Lee, Hyangsook, Kim, Jung-Hwa, Shin, Ilgyou, Yoo, Jeongho, Kim, Seokhoon, Choi, Seongheum, Kim, Jinyong, Park, Taejin, Kim, Yihwan, Hwang, Kihyun, Lee, Eunha, Kim, Hyoungsub

Journal:

Microelectronic Engineering

Year:

2019

Language:

english

File:

PDF, 1.61 MB

english, 2019

2

3D system integration on 300 mm wafer level: High-aspect-ratio TSVs with ruthenium seed layer by thermal ALD and subsequent copper electroplating

Killge, Sebastian, Bartusseck, Irene, Junige, Marcel, Neumann, Volker, Reif, Johanna, Wenzel, Christian, Böttcher, Mathias, Albert, Matthias, Jürgen Wolf, M., Bartha, Johann W.

Journal:

Microelectronic Engineering

Year:

2019

Language:

english

File:

PDF, 1.68 MB

english, 2019

3

Thermal and radiation chemistry of butyltin oxo hydroxo: A model inorganic photoresist

Frederick, Ryan T., Saha, Sumit, Trey Diulus, J., Luo, Feixiang, Amador, Jenn M., Li, Mengjun, Park, Deok-Hie, Garfunkel, Eric L., Keszler, Douglas A., Herman, Gregory S.

Journal:

Microelectronic Engineering

Year:

2019

Language:

english

File:

PDF, 1.12 MB

english, 2019

4

High performance, low temperature processed Hf-In-Zn-O/HfO2 thin film transistors, using PMMA as etch-stop and passivation layer

Pons-Flores, C.A., Mejia, I., Hernandez, I., Garduño, I., Estrada, M.

Journal:

Microelectronic Engineering

Year:

2019

Language:

english

File:

PDF, 818 KB

english, 2019

5

A thermo-activated tactile micro-actuator for displays

Puce, Salvatore, Dattoma, Tommaso, Rizzi, Francesco, Emara, Mohamed, Qualtieri, Antonio, De Vittorio, Massimo

Journal:

Microelectronic Engineering

Year:

2019

Language:

english

File:

PDF, 1.77 MB

english, 2019

6

Silicon carbide nanowire field effect transistors with high on/off current ratio

Uzun, Ali, Teker, Kasif

Journal:

Microelectronic Engineering

Year:

2019

Language:

english

File:

PDF, 1.13 MB

english, 2019

7

Editorial Board

Journal:

Microelectronic Engineering

Year:

2019

File:

PDF, 29 KB

2019

8

Ammonia sorption outgassing and cross contamination ability of Entegris FOUPs evaluation and its volatile acids comparison

González-Aguirre, Paola, Hérran, Fernando, Moon, Sung-In, Tran, Minh-Phuong, Lundgren, Jorgen, Beitia, Carlos, Fontaine, Hervé

Journal:

Microelectronic Engineering

Year:

2019

Language:

english

File:

PDF, 1.35 MB

english, 2019