Carbon Removal and Native Oxide Cleaning on Si and SiGe...

Solid State Phenomena 2018 / 8 Vol. 282

Carbon Removal and Native Oxide Cleaning on Si and SiGe Surfaces in Previum Chamber

Wang, Fei, Jotheeswaran, Bubesh, Tolle, John, Lin, Xing, Gao, Pei Pei, Demos, Alex
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Volume:
282
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.282.25
Date:
August, 2018
File:
PDF, 1.64 MB
2018
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