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AlN Wafers Fabricated by Hydride Vapor Phase Epitaxy
Nikolaev, Andrey, Nikitina, Irina, Zubrilov, Andrey, Mynbaeva, Marina, Melnik, Yuriy, Dmitriev, VladimirVolume:
5
Year:
2000
Language:
english
Journal:
MRS Internet Journal of Nitride Semiconductor Research
DOI:
10.1557/S1092578300004609
File:
PDF, 1005 KB
english, 2000